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2013-05-23 12:21
求翻译:Polysilicon as a versatile material has been found various applications in microelectronics and MEMS [4] and [5]. Since the invention of the first polysilicon pressure transducer in 1974 [6], many polysilicon pressure sensors have been reported [7], [8], [9] and [10]. In these reports, the piezoresistors of sensors wer是什么意思? 待解决
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Polysilicon as a versatile material has been found various applications in microelectronics and MEMS [4] and [5]. Since the invention of the first polysilicon pressure transducer in 1974 [6], many polysilicon pressure sensors have been reported [7], [8], [9] and [10]. In these reports, the piezoresistors of sensors wer
问题补充: |
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