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关注：1
2013-05-23 12:21
求翻译：demonstrates a special good performance. In this paper, a pressure sensor with high sensitivity and low temperature coefficient was fabricated; the novelty of the pressure sensor is that 80 nm polysilicon nanofilm was utilized as piezoresistors. The complete fabrication process of the sensor is described. The pressure 是什么意思？ 待解决
 悬赏分：1
- 离问题结束还有
demonstrates a special good performance. In this paper, a pressure sensor with high sensitivity and low temperature coefficient was fabricated; the novelty of the pressure sensor is that 80 nm polysilicon nanofilm was utilized as piezoresistors. The complete fabrication process of the sensor is described. The pressure
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2013-05-23 12:21:38
演示了一个特殊的性能良好。在本文中，压力传感器具有高灵敏度和低温度系数是捏造的压力传感器的新颖之处在于，80纳米的多晶硅纳米薄膜压阻利用。传感器的完整制造过程的描述。传感器的压力和温度特性进行了测定和讨论。
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2013-05-23 12:23:18
说明了一个特别良好的性能。 在这份文件中,一个压力传感器,高灵敏度和低温度系数是凭空捏造;这是一个崭新的压力传感器,nanofilm是利用80纳米制程的个多晶硅piezoresistors。 完整的传感器的制造流程进行说明。 这方面的压力,并将传感器测量的温度特性,讨论了。
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2013-05-23 12:24:58
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2013-05-23 12:26:38
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2013-05-23 12:28:18
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