求翻译：本文主要介绍了MEMS在谐振电路中的应用，以具体模型电容式RF MEMS谐振器为例对微机械谐振器进行了综合分析，包括MEMS的背景理论与发展前景，谐振电路的基本原理，对模型进行了基本过程分析、基本参数的理论分析及等效电路的分析。介绍了几种MEMS谐振器。重点分析了谐振系统中Q值的概念辨析，MEMS谐振回路各参数与能量传输效率的关系，谐振器的电容间隙及锚这两个重要的结构参数对谐振器性能的影响。最后，是对本次论文的一个总结是什么意思？

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