求翻译：本文通过研磨液的选择比及光刻聚焦条件的优化和熔丝形成工艺的改良使得这一低端熔断技术重新适用于65纳米的先进工艺，而且具备较好的生产稳定性和工艺窗口。是什么意思？

In this paper, the choice of slurry ratio and lithography focus and fuse to form the optimal conditions for the improvement of technology makes this low-fusing technology to re-apply to the advanced 65-nanometer process, and have better production stability, and process window.

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This article forms the craft through the grinding fluid choice when photoetching focusing condition optimization and the melt silk the improvement to cause this low end fuse technology to be suitable for 65 nanometer advanced crafts, moreover has the good production stability and the craft window.

Select ratio and lithography by slurry this article focus on optimization of forming process of improvement and fuse makes this low-end fusing technology applies to advanced 65 nanometer process again, and good stability of production and process Windows.

Select ratio and lithography by slurry this article focus on optimization of forming process of improvement and fuse makes this low-end fusing technology applies to advanced 65 nanometer process again, and good stability of production and process Windows.